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Abstract:
利用金属有机物化学气相沉积技术在蓝宝石衬底上低温生长GaN:Mg薄膜,对不同源流量的GaN:Mg材料特性进行优化研究.研究表明二茂镁(CP_2Mg)和三甲基镓(TMGa)物质的量比([CP_2Mg]/[TMGa])在1.4×10~(-3)-2.5×10~(-3)范围内,随[CP_2Mg]/[TMGa]增加,晶体质量提高,空穴浓度线性增加.当[CP_2Mg]/[TMGa]为2.5×10~(-3)时获得空穴浓度与在较高温度生长获得的空穴浓度相当,且薄膜表面较粗糙.采用[CP_2Mg]/[TMGa]为2.5×10~(-3)的p型GaN层制备的发光二极管,在注入电流为20 mA时,输出光强提高了17.2%.
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Source :
物理学报
ISSN: 1000-3290
Year: 2010
Issue: 2
Volume: 59
Page: 1233-1236
1 . 0 0 0
JCR@2022
ESI Discipline: PHYSICS;
JCR Journal Grade:2
Cited Count:
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count: 5
Chinese Cited Count:
30 Days PV: 1
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