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Author:

宇慧平 (宇慧平.) | 隋允康 (隋允康.) | 张峰翊 (张峰翊.) | 常新安 (常新安.)

Indexed by:

CQVIP PKU CSCD

Abstract:

采用低雷诺数K-ε紊流模型,考虑自然对流、晶体旋转和坩埚旋转等因素,对晶体直径为300mm,磁场强度变化范围在0~0.12T条件下,熔体硅内流场及氧的浓度分布、磁场分布等作了数值模拟.计算中采用有限体积法,运用SIMPLE(semi-implicit method for pressure linked equations)算法耦合压力和速度场,动量方程、能量方程中对流项的离散采用QUICK(quadratic upwind interpolation of convective kinematics)格式,紊动能和耗散项方程中对流项的离散采用迎风格式.数值模拟结果表明,在勾形磁场作用下,熔体硅内的流场、氧的浓度分布与无磁场作用相比有较大不同,随着磁场强度的增加,生长界面处氧的浓度降低,并且磁场确实能有效地抑制熔体内的紊流,有利于晶体生长.

Keyword:

单晶硅 氧浓度 勾形磁场 紊流模型

Author Community:

  • [ 1 ] [宇慧平]北京工业大学
  • [ 2 ] [隋允康]北京工业大学
  • [ 3 ] [张峰翊]北京有色金属研究总院
  • [ 4 ] [常新安]北京工业大学

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Source :

半导体学报

ISSN: 0253-4177

Year: 2005

Issue: 3

Volume: 26

Page: 517-523

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count: 13

Chinese Cited Count:

30 Days PV: 7

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