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Author:

Wang Ting (Wang Ting.) | Guo Xia (Guo Xia.) | Fang Yuan (Fang Yuan.) | Shen GuangDi (Shen GuangDi.)

Indexed by:

Scopus SCIE

Abstract:

An ultraviolet (UV) laser lift-off (LLO) technique was presented to form a roughened surface morphology on GaN membrane grown by metalorganic chemical vapor deposition (MOCVD). The etched surface showed cone-like structures on a free-standing GaN membrane. Based on the scanning electron microscopy (SEM) and atom force microscopy (AFM) measurements, the etching mechanism was proposed, which was related to the different decomposition depth caused by the dislocations in the GaN membrane. The etching efficiency and morphology of GaN by the LLO technique and the photoelectrochemical (PEC) wet etching technique was compared and analyzed. This roughed cone-like surface morphology by LLO can enhance the external efficiency of vertical structure n-side-up GaN-based light-emitting diodes (LEDs) simultaneously while being released of the performance constrains impeded by sapphire.

Keyword:

GaN roughening laser lift-off chemical wet etch

Author Community:

  • [ 1 ] Beijing Inst Technol, Sch Mechatron Engn, Beijing 100081, Peoples R China
  • [ 2 ] Beijing Univ Technol, Beijing Optoelect Technol Lab, Inst Elect Informat & Control Engn, Beijing 100022, Peoples R China

Reprint Author's Address:

  • [Wang Ting]Beijing Inst Technol, Sch Mechatron Engn, Beijing 100081, Peoples R China

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Source :

CHINESE SCIENCE BULLETIN

ISSN: 1001-6538

Year: 2007

Issue: 7

Volume: 52

Page: 1001-1005

JCR Journal Grade:2

Cited Count:

WoS CC Cited Count: 5

SCOPUS Cited Count: 6

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 9

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