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Abstract:
从激光与材料相互作用理论出发,分析了激光烧蚀材料等离子体羽辉的空间运动特征和成分分布;以YBCO/SrTiO3为对象,从实验上系统研究了脉冲激光溅射沉积薄膜过程中薄膜质量与基片温度、基片-靶村距离、气体压强、激光脉冲能量以及重复频率等参数的关系;总结出在SrTiO3(100)单晶基片上溅射沉积YBCO高温超导薄膜的最佳实验参数.
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应用激光
ISSN: 1000-372X
Year: 2002
Issue: 2
Volume: 22
Page: 236-240
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count: 11
Chinese Cited Count:
30 Days PV: 3
Affiliated Colleges: