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Abstract:
Pull-in parameters analysis, such as pull-in voltage and pull-in displacement, of contact type electrostatically actuated MEMS switches is investigated. Using Euler-Bernoulli beam theory, a cantilever beam model is established. Based on the method of Galerkin decomposition, the model is changed to a discrete modal equations, including nonlinear electrostatic force. Based on the equilibrium stability analysis, pull-in voltage and pull-in displacement are discussed. The simulation results can be used as design tools and rules to improve switch performance.
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PROCEEDINGS OF THE 2011 INTERNATIONAL CONFERENCE ON INFORMATICS, CYBERNETICS, AND COMPUTER ENGINEERING (ICCE2011), VOL 2: INFORMATION SYSTEMS AND COMPUTER ENGINEERING
ISSN: 1867-5662
Year: 2011
Volume: 111
Page: 633-639
Language: English
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 2
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