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Abstract:
将带有TiN、W和Mo阻挡层的Au金属化系统用在高频大功率三极管上,对其EB结进行了高温大电流应力和高温存储试验。结果表明采用TiN作阻挡层的管子的寿命比用W作阻挡层的管子提高了两倍多:用TiN作阻挡层的管子和用W作阻挡层的管子具有较好的耐高温特性,与Mo作阻挡层的管子相比它们承受的温度更高。
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Source :
北京工业大学学报
Year: 1996
Issue: 04
Page: 37-40
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 5
Affiliated Colleges: