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Author:

郭伟玲 (郭伟玲.) | 李志国 (李志国.) | 程尧海 (程尧海.) | 孙英华 (孙英华.)

Indexed by:

CQVIP CSCD

Abstract:

将带有TiN、W和Mo阻挡层的Au金属化系统用在高频大功率三极管上,对其EB结进行了高温大电流应力和高温存储试验。结果表明采用TiN作阻挡层的管子的寿命比用W作阻挡层的管子提高了两倍多:用TiN作阻挡层的管子和用W作阻挡层的管子具有较好的耐高温特性,与Mo作阻挡层的管子相比它们承受的温度更高。

Keyword:

Si微波器件 TiN阻挡层 新型Au金属化

Author Community:

  • [ 1 ] 北京工业大学电子工程学系

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Source :

北京工业大学学报

Year: 1996

Issue: 04

Page: 37-40

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 5

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