Abstract:
北京正负电子对撞机的3B1束线是一条专用光刻束线,光源的性能将影响光刻的质量,必须用特殊的探测方法对光源特性进行监测,为此建立了一套同步辐射光的实时监测系统。
Keyword:
Reprint Author's Address:
Email:
Source :
北京工业大学学报
Year: 1993
Issue: 02
Page: 55-59
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 5
Affiliated Colleges: