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Author:

Zhang, Ya (Zhang, Ya.) | Kondo, Ryoka (Kondo, Ryoka.) | Qiu, Boqi (Qiu, Boqi.) | Liu, Xin (Liu, Xin.) | Hirakawa, Kazuhiko (Hirakawa, Kazuhiko.)

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EI Scopus SCIE

Abstract:

We report on a giant enhancement in the thermal responsivity of doubly clamped GaAs microelectromechanical-system- (MEMS) beam resonators by using the internal-mode-coupling effect. This is achieved by coupling the fundamental bending mode with the fundamental torsional mode of the MEMS-beam resonators through the cubic Duffing nonlinearity. In the mode-coupling regime, we find that when the input heat to the MEMS resonators is modulated at a particular frequency, the resonance-frequency shift caused by heating can be enhanced by almost 2 orders of magnitude. The observed effect is promising for realization of high-sensitivity thermal sensing by use of MEMS resonators, such as ultrasensitive terahertz detection at room temperature.

Keyword:

Author Community:

  • [ 1 ] [Zhang, Ya]Tokyo Univ Agr & Technol, Inst Engn, Koganei, Tokyo 1848588, Japan
  • [ 2 ] [Kondo, Ryoka]Univ Tokyo, Inst Ind Sci, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan
  • [ 3 ] [Qiu, Boqi]Univ Tokyo, Inst Ind Sci, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan
  • [ 4 ] [Hirakawa, Kazuhiko]Univ Tokyo, Inst Ind Sci, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan
  • [ 5 ] [Hirakawa, Kazuhiko]Univ Tokyo, Inst Nano Quantum Informat Elect, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan
  • [ 6 ] [Liu, Xin]Beijing Univ Technol, Beijing Dublin Int Coll, 100 Pingleyuan, Beijing 100124, Peoples R China
  • [ 7 ] [Liu, Xin]Beijing Univ Technol, Inst Theoret Phys, 100 Pingleyuan, Beijing 100124, Peoples R China

Reprint Author's Address:

  • [Zhang, Ya]Tokyo Univ Agr & Technol, Inst Engn, Koganei, Tokyo 1848588, Japan;;[Hirakawa, Kazuhiko]Univ Tokyo, Inst Ind Sci, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan;;[Hirakawa, Kazuhiko]Univ Tokyo, Inst Nano Quantum Informat Elect, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan

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Source :

PHYSICAL REVIEW APPLIED

ISSN: 2331-7019

Year: 2020

Issue: 1

Volume: 14

4 . 6 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:100

Cited Count:

WoS CC Cited Count: 6

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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