Tungsten　is　considered　as　the　foremost　candidate　material　for　the　plasma　facing　material　(PFM)　in　future　fusion　device,　and　excellent　high　temperature　oxidation　resistance　is　the　important　safety　criterion　to　prevent　radioactive　pollution　in　case　of　a　Loss-of-Coolant-Accident　(LOCA)　with　simultaneous　air　ingress.　Recently,　high　entropy　alloys　were　found　to　have　prominent　high　temperature　oxidation　resistance　and　corrosion　resistance.　The　present　paper　focuses　on　the　high　temperature　oxidation　resistance　of　tungsten　based　high　entropy　alloy,　and　their　structures　and　corrosion　resistances　are　also　studied.　In　this　study,　thin　films　of　W,　WTa,　WTaCr,　WTaCrV,　WTaCrVAl,　WTaCrVAlTi　and　WTaCrVAlTiZr　were　prepared　via　the　magnetron　sputtering　method　with　a　kind　of　composed　target　consisting　of　fan-shapes.　The　results　show　that　as　the　number　of　selected　elements　increases,　the　entropy　increases,　the　disorder　of　film　structure　increases　significantly　resulting　in　the　formation　of　amorphous　structure,　and　the　corrosion　resistance　and　oxidation　resistance　of　the　alloys　also　improve　greatly.　The　further　analysis　and　experiments　proved　that:　one　important　reason　for　the　improving　of　corrosion　resistance　and　oxidation　resistance　is　that　the　increase　of　mixing　entropy　reduces　the　Gibbs　free　energy　of　alloys　and　makes　them　more　chemically　stable;　another　reason　is　that　the　elements　of　Cr,　Al,　Ti　and　Zr　can　promote　the　formation　of　dense　oxide　passive　layer.