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Author:

He, Xiaoguang (He, Xiaoguang.) | Feng, Yuxia (Feng, Yuxia.) | Yang, Xuelin (Yang, Xuelin.) | Wu, Shan (Wu, Shan.) | Cai, Zidong (Cai, Zidong.) | Wei, Jia (Wei, Jia.) | Shen, Jianfei (Shen, Jianfei.) | Huang, Huayang (Huang, Huayang.) | Liu, Danshuo (Liu, Danshuo.) | Chen, Zhenghao (Chen, Zhenghao.) | Ma, Cheng (Ma, Cheng.) | Ge, Weikun (Ge, Weikun.) | Shen, Bo (Shen, Bo.)

Indexed by:

EI Scopus SCIE

Abstract:

In this work, we study the impacts of different types of strain relief layer (SRL) on dynamic on-resistance (R (on)) degradation of GaN power devices on Si by back-gate ramping and vertical leakage measurement. Our study reveals that the SRL has important effects on the dynamic R (on). Compared with step-graded AlGaN SRL, the superlattice SRL possesses much more energy barriers, which can more effectively block the leakage of holes from GaN buffer and the injection of electrons from Si substrate. Enhancing the carrier blocking ability of SRL could contribute to the suppression of dynamic R (on) degradation.

Keyword:

Strain relief layer GaN-on-Si Dynamic R (on)

Author Community:

  • [ 1 ] [He, Xiaoguang]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 2 ] [Yang, Xuelin]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 3 ] [Wu, Shan]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 4 ] [Cai, Zidong]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 5 ] [Shen, Jianfei]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 6 ] [Huang, Huayang]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 7 ] [Liu, Danshuo]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 8 ] [Chen, Zhenghao]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 9 ] [Ma, Cheng]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 10 ] [Ge, Weikun]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 11 ] [Shen, Bo]Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
  • [ 12 ] [Feng, Yuxia]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 13 ] [Wei, Jia]Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 14 ] [Yang, Xuelin]Peking Univ, Minist Educ, Nanooptoelect Frontier Ctr, Beijing 100871, Peoples R China
  • [ 15 ] [Shen, Bo]Peking Univ, Minist Educ, Nanooptoelect Frontier Ctr, Beijing 100871, Peoples R China
  • [ 16 ] [Shen, Bo]Collaborat Innovat Ctr Quantum Matter, Beijing 100871, Peoples R China

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Source :

APPLIED PHYSICS EXPRESS

ISSN: 1882-0778

Year: 2022

Issue: 1

Volume: 15

2 . 3

JCR@2022

2 . 3 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:41

JCR Journal Grade:3

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count: 12

SCOPUS Cited Count: 11

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 6

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