Background:　The　thermal　bubble-driven　micro　actuators　have　advantages　of　simple　structure　and　low　working　voltage,　which　have　broad　prospects　in　the　field　of　micro-fluidic　sys-tems.　Methods:　This　paper　presents　a　new　type　of　micro-planar　induction　heater　which　can　realize　the　fixed-point　growth　of　thermal　bubbles　by　adding　some　active　cavities.　The　micro-planar　induction　heater　is　composed　of　a　metal　heating　plate,　a　glass　substrate,　and　a　planar　coil.　Results:　In　the　experiments,　an　alternating　current　of　80　kHz　was　applied　to　the　micro-planar　induction　heater;　both　the　heating　time　and　the　interruption　time　were　1　s　controlled　by　a　PLC.　A　CCD　camera　was　used　to　record　the　generation　process　of　thermal　bubbles,　including　nucleation,　growth,　and　shrinkage.　The　experimental　results　show　that　thermal　bubbles　can　grow　and　contract　periodically　at　the　position　of　the　cavities　when　the　cavities　diameter　is　50　μm　and　90　μm,　respectively.　The　ideal　thickness　of　the　heating　plate　is　between　6　μm　and　13　μm.　Conclusion:　Here,　the　fixed-point　growth　of　the　thermal　bubble　with　a　micro-planar　induction　heater　has　been　studied.　This　kind　of　fixed-point　growth　of　thermal　bubbles　can　be　used　in　micro　actuators,　such　as　micro　ejectors,　micro　mixers,　and　micro　pumps.　©　2022　Bentham　Science　Publishers.