• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

Xiong, Fangzhu (Xiong, Fangzhu.) | Qian, Fengsong (Qian, Fengsong.) | Sun, Jie (Sun, Jie.) | Guo, Weiling (Guo, Weiling.) (Scholars:郭伟玲) | Li, Longfei (Li, Longfei.) | Xie, Yiyang (Xie, Yiyang.) | Du, Zaifa (Du, Zaifa.) | Dong, Yibo (Dong, Yibo.) | Wang, Le (Wang, Le.) | Xu, Chen (Xu, Chen.)

Indexed by:

EI Scopus SCIE

Abstract:

Using the plasma-enhanced chemical vapor deposition method, we grow vertical graphene thin films onto SiO2/Si substrates, which is a special format of graphene composed of numerous macroscopically uniformly distributed graphene flakes approximately vertically arranged. The growth parameters, including the growth temperature, growth time and plasma power, are systematically studied and optimized. Most importantly, the function of plasma has been revealed. In the same deposition machine, we have altered the plasma electrode and heater configurations, and found that the vertical graphene can only grow in local plasma environment. That is, the samples have to be well immersed in the plasma sheath electric field. In this way, the vertical growth of graphene and the local enhancement of electric field can form a positive feedback loop, resulting in the continuous growth of vertical graphene. This experiment clarifies the function of plasma electric field in the vertical graphene growth, and can offer hints for the growth of other vertical two-dimensional materials as well. The vertical graphene films are scalable, transfer-free and lithographically patternable, which is compatible with standard semiconductor processing and promising for optoelectronic applications. We have characterized the optical properties of the as-grown vertical graphene films, where a nearly zero transmittance is observed for 1100-2600nm wavelengths, indicating a superstrong absorption in the black colored vertical graphene.

Keyword:

Vertical graphene PECVD local plasma remote plasma

Author Community:

  • [ 1 ] [Xiong, Fangzhu]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Qian, Fengsong]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Guo, Weiling]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Li, Longfei]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Xie, Yiyang]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Du, Zaifa]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Dong, Yibo]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Wang, Le]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 9 ] [Xu, Chen]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 10 ] [Sun, Jie]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display T, Fuzhou 350116, Peoples R China
  • [ 11 ] [Sun, Jie]Fujian Sci & Technol Innovat Lab Optoelect Inform, Fuzhou 350116, Peoples R China

Reprint Author's Address:

Show more details

Related Keywords:

Related Article:

Source :

NANO

ISSN: 1793-2920

Year: 2022

Issue: 10

Volume: 17

1 . 2

JCR@2022

1 . 2 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:41

JCR Journal Grade:4

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count: 1

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 7

Affiliated Colleges:

Online/Total:1101/10665933
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.