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Author:

Zhang, Ya (Zhang, Ya.) | Yoshioka, Yuri (Yoshioka, Yuri.) | Iimori, Mirai (Iimori, Mirai.) | Qiu, Boqi (Qiu, Boqi.) | Liu, Xin (Liu, Xin.) | Hirakawa, Kazuhiko (Hirakawa, Kazuhiko.)

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EI Scopus SCIE

Abstract:

We report the thermal tuning of the mechanical nonlinearity in GaAs double-clamped MEMS beam resonators for sensitive thermal sensing applications. We have estimated the mechanical nonlinearity in GaAs MEMS beam resonator by measuring its resonance frequency as a function of oscillation amplitude. The MEMS resonator shows a hardening nonlinearity with a small linear oscillation range of & SIM;30 nm. When electrical heat is applied to the MEMS beam, we have observed a significant reduction in the mechanical nonlinearity of MEMS resonators near the buckling point of the MEMS beam. The decrease in the mechanical nonlinearity originates from the bending of the MEMS beam, which gives a softening nonlinearity term and, hence, compensates the total nonlinearity. With the thermal tuning effect, MEMS resonator can maintain a very large quasi linear oscillation amplitude of & SIM;300 nm, which is & SIM;10 times larger than the linear oscillation range without the control of nonlinearity.

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Author Community:

  • [ 1 ] [Zhang, Ya]Tokyo Univ Agr & Technol, Inst Engn, Koganei, Tokyo 1848588, Japan
  • [ 2 ] [Yoshioka, Yuri]Tokyo Univ Agr & Technol, Inst Engn, Koganei, Tokyo 1848588, Japan
  • [ 3 ] [Iimori, Mirai]Tokyo Univ Agr & Technol, Inst Engn, Koganei, Tokyo 1848588, Japan
  • [ 4 ] [Qiu, Boqi]Univ Tokyo, Inst Ind Sci, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan
  • [ 5 ] [Hirakawa, Kazuhiko]Univ Tokyo, Inst Ind Sci, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan
  • [ 6 ] [Liu, Xin]Beijing Univ Technol, Beijing Dublin Int Coll, 100 Pingleyuan, Beijing 100124, Peoples R China
  • [ 7 ] [Liu, Xin]Beijing Univ Technol, Inst Theoret Phys, 100 Pingleyuan, Beijing 100124, Peoples R China
  • [ 8 ] [Hirakawa, Kazuhiko]Univ Tokyo, Inst Nano Quantum Informat Elect, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan

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Source :

APPLIED PHYSICS LETTERS

ISSN: 0003-6951

Year: 2021

Issue: 16

Volume: 119

4 . 0 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:72

JCR Journal Grade:2

Cited Count:

WoS CC Cited Count: 8

SCOPUS Cited Count: 10

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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