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Author:

Wang, Lihao (Wang, Lihao.) | Jia, Yunpeng (Jia, Yunpeng.) | Zhou, Xintian (Zhou, Xintian.) | Zhao, Yuanfu (Zhao, Yuanfu.) | Hu, Dongqing (Hu, Dongqing.) | Wu, Yu (Wu, Yu.) | Deng, Zhonghan (Deng, Zhonghan.)

Indexed by:

EI Scopus SCIE

Abstract:

In this paper, a novel SiC trench-gate MOSFET with integrated heterojunction diode (HD-TG-MOS) is proposed and studied according to TCAD simulations. The n-type polysilicon/n-type SiC HD is introduced into the groove by the direct contact between the polysilicon and semiconductor. As a result, significant improvements of device performance in the first and third quadrants are observed as compared to the conventional SiC trench-gate MOSFET (C-TG-MOS). Better yet, aided by the extremely low barrier height across the heterojunction, the knee voltage reduces to only 0.5 V with comparison of that of similar to 2.7 V for the body diode, when used for reverse freewheeling. These promotions make SiC HD-TG-MOS more advantageous for HF power conversion applications. In addition, another cell architecture variant adopting a similar concept is presented, and the according process implementation is addressed as well from viewpoint of manufacture.

Keyword:

high-frequency power conversion applications heterojunction diode SiC trench MOSFET

Author Community:

  • [ 1 ] [Wang, Lihao]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Jia, Yunpeng]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Zhou, Xintian]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Zhao, Yuanfu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Hu, Dongqing]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Wu, Yu]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Deng, Zhonghan]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Zhao, Yuanfu]Beijing Microelect Technol Inst, Beijing 100076, Peoples R China

Reprint Author's Address:

  • [Zhou, Xintian]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China;;

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Source :

JAPANESE JOURNAL OF APPLIED PHYSICS

ISSN: 0021-4922

Year: 2023

Issue: 4

Volume: 62

1 . 5 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:17

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

Affiliated Colleges:

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