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Author:

Jianhui Li (Jianhui Li.) | Yanqiu Li (Yanqiu Li.) | Ke Liu (Ke Liu.) | Guodong Zhou (Guodong Zhou.) | Lihui Liu (Lihui Liu.) | Meng Zheng (Meng Zheng.)

Abstract:

Polarization aberration of hyper-numerical-aperture projection optics should be measured accurately in order to control it exactly and ensure favorable imaging performance. A hybrid calibration method combining the Fourier analysis method and the eigenvalue calibration method is proposed. A wide-view-angle Mueller polarimeter (WMP) is exemplified to demonstrate the capability of the proposed calibration method, which can calibrate the polarimeter and determine the error budget of polarizing elements in the polarimeter. In addition, an experimental setup and a WMP are developed in-house to implement the hybrid calibration method.

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Author Community:

  • [ 1 ] [Lihui Liu]北京工业大学
  • [ 2 ] [Yanqiu Li]北京工业大学
  • [ 3 ] [Guodong Zhou]北京工业大学
  • [ 4 ] [Meng Zheng]北京工业大学
  • [ 5 ] [Jianhui Li]北京工业大学
  • [ 6 ] [Ke Liu]北京工业大学

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Source :

中国光学快报(英文版)

Year: 2020

Issue: 8

Volume: 18

Page: 081202

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count: -1

Chinese Cited Count:

30 Days PV: 11

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