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Author:

Sang, Ling (Sang, Ling.) | Jin, Rui (Jin, Rui.) | Cui, Jiawei (Cui, Jiawei.) | Niu, Xiping (Niu, Xiping.) | Li, Zheyang (Li, Zheyang.) | Yang, Junjie (Yang, Junjie.) | Nuo, Muqin (Nuo, Muqin.) | Zhang, Meng (Zhang, Meng.) | Wang, Maojun (Wang, Maojun.) | Wei, Jin (Wei, Jin.)

Indexed by:

Scopus SCIE

Abstract:

A SiC fin-channel MOSFET structure (Fin-MOS) is proposed for an enhanced gate shielding effect. The gates are placed on each side of the narrow fin-channel region, while grounded p-shield regions below the gates provide a strong shielding effect. The device is investigated using Sentaurus TCAD. For a narrow fin-channel region, there is difficulty in forming an Ohmic contact to the p-base; a floating p-base might potentially store negative charges upon high drain voltage, and, thus, causes threshold voltage instabilities. The simulation reveals that, for a fin-width of 0.2 mu m, the p-shield regions provide a stringent shielding effect against high drain voltage, and the dynamic threshold voltage shift (triangle Vth) is negligible. Compared to conventional trench MOSFET (Trench-MOS) and asymmetric trench MOSFET (Asym-MOS), the proposed Fin-MOS boasts the lowest OFF-state oxide field and reverse transfer capacitance (Crss), while maintaining a similar low ON-resistance.

Keyword:

dynamic threshold voltage fin-channel gate shielding effect SiC MOSFET

Author Community:

  • [ 1 ] [Sang, Ling]Beijing Inst Smart Energy, Beijing 102209, Peoples R China
  • [ 2 ] [Jin, Rui]Beijing Inst Smart Energy, Beijing 102209, Peoples R China
  • [ 3 ] [Niu, Xiping]Beijing Inst Smart Energy, Beijing 102209, Peoples R China
  • [ 4 ] [Li, Zheyang]Beijing Inst Smart Energy, Beijing 102209, Peoples R China
  • [ 5 ] [Sang, Ling]Beijing Huairou Lab, Beijing 101409, Peoples R China
  • [ 6 ] [Jin, Rui]Beijing Huairou Lab, Beijing 101409, Peoples R China
  • [ 7 ] [Niu, Xiping]Beijing Huairou Lab, Beijing 101409, Peoples R China
  • [ 8 ] [Li, Zheyang]Beijing Huairou Lab, Beijing 101409, Peoples R China
  • [ 9 ] [Cui, Jiawei]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 10 ] [Yang, Junjie]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 11 ] [Nuo, Muqin]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 12 ] [Wang, Maojun]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 13 ] [Wei, Jin]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 14 ] [Zhang, Meng]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China

Reprint Author's Address:

  • [Jin, Rui]Beijing Inst Smart Energy, Beijing 102209, Peoples R China;;[Jin, Rui]Beijing Huairou Lab, Beijing 101409, Peoples R China;;

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Source :

ELECTRONICS

Year: 2024

Issue: 9

Volume: 13

2 . 9 0 0

JCR@2022

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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