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Abstract:
Using the optical feedback interferometry (OFI) technique, we demonstrated a miniaturized and compact sensor system based on a dedicated optical source for flowmetry at the micro-scale. In the system, polymer microlenses were integrated directly on a VCSEL (vertical-cavity surface-emitting laser) chip and the microfluidic channel chip surface using polymer-based micro-fabrication technologies. In particular, at a post-process stage, we integrated a collimation lens on a VCSEL chip of small dimensions (200 mu m x 200 mu m x 150 mu m). This process was enabled by the soft-printing of dry thick resist films and through direct laser writing technology. We performed flow rate measurements using this new compact system, with a conventional bulk glass lens configuration for system performance evaluation. A maximum 33 dB signal-to-noise ratio was achieved from this novel ultra-compact system. To our knowledge, this is the highest signal level achieved by existing OFI based flowmetry sensors.
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APPLIED SCIENCES-BASEL
Year: 2019
Issue: 24
Volume: 9
2 . 7 0 0
JCR@2022
ESI Discipline: ENGINEERING;
ESI HC Threshold:136
JCR Journal Grade:2
Cited Count:
WoS CC Cited Count: 6
SCOPUS Cited Count: 6
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 5
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