• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

Tang, Penghao (Tang, Penghao.) | Wang, Rongjing (Wang, Rongjing.) | Liu, Jixin (Liu, Jixin.) | Fang, Aoqi (Fang, Aoqi.) | Xu, Hao (Xu, Hao.) | Sun, Jie (Sun, Jie.) | Guo, Weiling (Guo, Weiling.)

Indexed by:

EI

Abstract:

Micro light-emitting diode (LED) is one of the important research directions in the field of optoelectronics, and transparent electrodes with high conductivity and high transmittance play an important role in it. Graphene has excellent physical and chemical properties and has become one of the most potential transparent electrode materials. In this paper, transfer-free patterned graphene transparent electrodes were fabricated and applied to GaN-based micro LEDs. In this scheme, the Ni film is used as etching masks and graphene growth catalysts, simplifying the process flow and growing patterned graphene. The SiO2 isolation layer prevents the fusion of p-type GaN and Ni at 600 °C, protecting the integrity of GaN and the catalytic performance of Ni. Both Ni and SiO2 are removed by wet etching, and patterned graphene is prepared on the surface of GaN without transfer process. The results show that the multilayer graphene achieves good current expansion and transparency, and the micro LEDs fabricated exhibits good optical and electrical properties. The graphene prepared by this method avoids the potential damage to the graphene during the transfer process and the patterning process, and plays an excellent role as a transparent electrode on micro LEDs. ©2024 IEEE.

Keyword:

Graphite electrodes Transparent electrodes Wet etching Gallium nitride Laser beams

Author Community:

  • [ 1 ] [Tang, Penghao]the Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Beijing 100124, China No. 100 Pingle Yuan, Chaoyang District, Beijing
  • [ 2 ] [Wang, Rongjing]the Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Beijing 100124, China No. 100 Pingle Yuan, Chaoyang District, Beijing
  • [ 3 ] [Liu, Jixin]the Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Beijing 100124, China No. 100 Pingle Yuan, Chaoyang District, Beijing
  • [ 4 ] [Fang, Aoqi]the Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Beijing 100124, China No. 100 Pingle Yuan, Chaoyang District, Beijing
  • [ 5 ] [Xu, Hao]the Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Beijing 100124, China No. 100 Pingle Yuan, Chaoyang District, Beijing
  • [ 6 ] [Sun, Jie]the Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Beijing 100124, China No. 100 Pingle Yuan, Chaoyang District, Beijing
  • [ 7 ] [Guo, Weiling]the Key Laboratory of Optoelectronics Technology, Beijing University of Technology, Beijing 100124, China No. 100 Pingle Yuan, Chaoyang District, Beijing

Reprint Author's Address:

Email:

Show more details

Related Keywords:

Source :

Year: 2024

Page: 397-400

Language: English

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 9

Affiliated Colleges:

Online/Total:509/10640425
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.