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Author:

Wu, Jianwei (Wu, Jianwei.) | Wang, Jiyao (Wang, Jiyao.) | Zheng, Jian (Zheng, Jian.) | Zhao, Pengyue (Zhao, Pengyue.) | Gao, Xifeng (Gao, Xifeng.) | Wen, Zhongpu (Wen, Zhongpu.)

Indexed by:

EI Scopus

Abstract:

With the development of aerostatic lubrication technology and the urgent need of compatible vacuum working environment, vacuum aerostatic bearing based on sealing design has become one of the hot topics. Because of its advantages of high dynamic, frictionless, high precision, and no pollution, it has a good application prospect in precision machining, measurement and other fields. It provides in detail overview of the research status of vacuum aerostatic bearings both domestically and internationally, including lubrication mechanism, structure optimization, and experiment research. The advantages and disadvantages of vacuum aerostatic bearings compared with traditional aerostatic bearings are compared, and the conventional sealing methods and efficient extraction methods of vacuum aerostatic bearings are summarized. On this basis, the critical technical problems such as support characteristics, structural design, and processing technology that need to be solved in the design of vacuum aerostatic bearings are analysed, and the future development trend of vacuum aerostatic bearings is preliminarily prospected, which provides the corresponding basis for the design of vacuum aerostatic bearings. © 2025 Chinese Mechanical Engineering Society. All rights reserved.

Keyword:

Bearings (structural) Seals Vacuum applications Structural optimization Shape optimization Hydrostatic bearings

Author Community:

  • [ 1 ] [Wu, Jianwei]Centre of Ultra-precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin; 150001, China
  • [ 2 ] [Wu, Jianwei]Key Lab of Ultra-precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin; 150080, China
  • [ 3 ] [Wang, Jiyao]Centre of Ultra-precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin; 150001, China
  • [ 4 ] [Wang, Jiyao]Key Lab of Ultra-precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin; 150080, China
  • [ 5 ] [Zheng, Jian]Centre of Ultra-precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin; 150001, China
  • [ 6 ] [Zheng, Jian]Key Lab of Ultra-precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin; 150080, China
  • [ 7 ] [Zhao, Pengyue]Centre of Ultra-precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin; 150001, China
  • [ 8 ] [Zhao, Pengyue]Key Lab of Ultra-precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin; 150080, China
  • [ 9 ] [Gao, Xifeng]Centre of Ultra-precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin; 150001, China
  • [ 10 ] [Gao, Xifeng]Key Lab of Ultra-precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin; 150080, China
  • [ 11 ] [Wen, Zhongpu]Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing; 100124, China

Reprint Author's Address:

  • [wu, jianwei]key lab of ultra-precision intelligent instrumentation, ministry of industry information technology, harbin; 150080, china;;[wu, jianwei]centre of ultra-precision optoelectronic instrumentation engineering, harbin institute of technology, harbin; 150001, china;;

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Source :

Journal of Mechanical Engineering

ISSN: 0577-6686

Year: 2025

Issue: 5

Volume: 61

Page: 13-25

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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