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Silicon-based hetero-junction phototransistor (HPT) is a potential optical detector promising for communication links in optic-interconnect network due to their advantages of low cost, high internal gain, high sensitivity, and compatibility with CMOS processes. In this work, a SiGe/Si HPT with double-zone base is designed and optimized to provide high responsivity and outstanding frequency characteristics simultaneously. The SiGe HPTs with different window positions and areas are fabricated using BiCMOS-compatible mesa process, and the influence of transverse parameters on HPT performance is analyzed comprehensively. With this design, a maximum optical responsivity of 8.52 A/W and a maximum optical 3 dB bandwidth of 638 MHz are demonstrated. The responsivity bandwidth product achieves 4.69 GHz & sdot;A/W with 50 x 50 mu m(2) optical window on emitter mesa under 850 nm incident light, which is expected to be applied in silicon-based optical connecting technology to simplify the optical receiving circuits and lower its power consumption.
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IEEE TRANSACTIONS ON ELECTRON DEVICES
ISSN: 0018-9383
Year: 2025
Issue: 5
Volume: 72
Page: 2417-2423
3 . 1 0 0
JCR@2022
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 0
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