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Author:

Huang, Lei (Huang, Lei.) | Chen, Yanqi (Chen, Yanqi.) | Wang, Qingxin (Wang, Qingxin.) | Li, Su (Li, Su.) | Ke, Changjun (Ke, Changjun.) | Guo, Guangyan (Guo, Guangyan.) | Rong, Lu (Rong, Lu.) | Shi, Yishi (Shi, Yishi.)

Indexed by:

EI Scopus SCIE

Abstract:

Ptychography offers several advantages, including a lensless design, a simple optical setup, high spatial resolution, and the elimination of the need for high-quality optical components. In applications like surface topography measurement, ptychography setups are typically configured in reflective mode. However, existing studies indicate that normal-incidence configurations are often complex and constrained by the arrangement of beam splitters. Furthermore, tilted illumination with vertical detection typically involves tilted plane correction methods for pre-correcting diffraction patterns or by developing more refined models, which can degrade reconstruction accuracy and increase computational overhead. This study derives a forward propagation model for reflective off-axis diffraction, where the beam maintains the same angle relative to both the sample plane and the recording plane, thereby eliminating the need for a pre-correction process. Based on our propagation model, we developed a regularized ptychography iterative engine combined with a total variation denoising algorithm, effectively suppressing sensor noise and potential experimental inaccuracies. Reflective samples were successfully reconstructed, and comparisons with pre-correction methods on USAF 1951 targets demonstrated a significant improvement in reconstruction speed as well as enhanced accuracy. Finally, the proposed method accurately retrieved the surface morphology of atomic force microscope test samples.

Keyword:

Adaptive total variation denoising Surface topography measurement Off-axis diffraction model Reflective ptychography

Author Community:

  • [ 1 ] [Huang, Lei]Chinese Acad Sci, Aerosp Informat Res Inst, Beijing 100094, Peoples R China
  • [ 2 ] [Ke, Changjun]Chinese Acad Sci, Aerosp Informat Res Inst, Beijing 100094, Peoples R China
  • [ 3 ] [Guo, Guangyan]Chinese Acad Sci, Aerosp Informat Res Inst, Beijing 100094, Peoples R China
  • [ 4 ] [Shi, Yishi]Chinese Acad Sci, Aerosp Informat Res Inst, Beijing 100094, Peoples R China
  • [ 5 ] [Huang, Lei]Univ Chinese Acad Sci, Sch Optoelect, Beijing 100049, Peoples R China
  • [ 6 ] [Chen, Yanqi]Univ Chinese Acad Sci, Sch Optoelect, Beijing 100049, Peoples R China
  • [ 7 ] [Wang, Qingxin]Univ Chinese Acad Sci, Sch Optoelect, Beijing 100049, Peoples R China
  • [ 8 ] [Ke, Changjun]Univ Chinese Acad Sci, Sch Optoelect, Beijing 100049, Peoples R China
  • [ 9 ] [Shi, Yishi]Univ Chinese Acad Sci, Sch Optoelect, Beijing 100049, Peoples R China
  • [ 10 ] [Shi, Yishi]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 11 ] [Chen, Yanqi]Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China
  • [ 12 ] [Wang, Qingxin]Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China
  • [ 13 ] [Li, Su]Hebei Univ Engn, Coll Math & Phys, Handan 056038, Hebei, Peoples R China
  • [ 14 ] [Rong, Lu]Beijing Univ Technol, Sch Phys & Optoelect Engn, 100 Ping Le Yuan, Beijing 100124, Peoples R China

Reprint Author's Address:

  • [Shi, Yishi]Chinese Acad Sci, Aerosp Informat Res Inst, Beijing 100094, Peoples R China

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Source :

OPTICS AND LASERS IN ENGINEERING

ISSN: 0143-8166

Year: 2025

Volume: 191

4 . 6 0 0

JCR@2022

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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