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Abstract:
The light extraction efficiency can be efficiently improved by omni directional re-flector (ODR) in AlGaInP light emitting diodes. The design and the processing of ODR were optimized; λ/4n thick SiO2 was adopted as medium, then photolithography and etching were processed to form the micro contact holes. Afterwards, on the condition of keeping photo resist AuZnAu was sputtered and peeled off. Finally 300 nm thick Au was sputtered. After annealed, the reflectivity of ODR (Au-SiO2-p-GaAs) can reach 72%, higher 8.8% than that of single sputtering ODR (AuZnAu-SiO2-p-GaAs). Both high reflectivity and ohmic contact can be satisfied for LED.
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Research and Progress of Solid State Electronics
ISSN: 1000-3819
Year: 2008
Issue: 4
Volume: 28
Page: 537-539
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 5
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