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Author:

Gao, Wei (Gao, Wei.) | Zou, Deshu (Zou, Deshu.) | Guo, Weiling (Guo, Weiling.) | Song, Xinyuan (Song, Xinyuan.) | Sun, Hao (Sun, Hao.) | Shen, Guangdi (Shen, Guangdi.)

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EI Scopus PKU CSCD

Abstract:

The light extraction efficiency can be efficiently improved by omni directional re-flector (ODR) in AlGaInP light emitting diodes. The design and the processing of ODR were optimized; λ/4n thick SiO2 was adopted as medium, then photolithography and etching were processed to form the micro contact holes. Afterwards, on the condition of keeping photo resist AuZnAu was sputtered and peeled off. Finally 300 nm thick Au was sputtered. After annealed, the reflectivity of ODR (Au-SiO2-p-GaAs) can reach 72%, higher 8.8% than that of single sputtering ODR (AuZnAu-SiO2-p-GaAs). Both high reflectivity and ohmic contact can be satisfied for LED.

Keyword:

Silica Gallium arsenide Silicon Zinc alloys Indium alloys Reflection Semiconducting gallium Ohmic contacts Semiconductor alloys Ternary alloys Gallium alloys III-V semiconductors Photolithography Light emitting diodes Gold alloys Etching Diodes Aluminum alloys

Author Community:

  • [ 1 ] [Gao, Wei]Beijing Optoelectronic Technology Laboratory, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Zou, Deshu]Beijing Optoelectronic Technology Laboratory, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [Guo, Weiling]Beijing Optoelectronic Technology Laboratory, Beijing University of Technology, Beijing 100022, China
  • [ 4 ] [Song, Xinyuan]Beijing Optoelectronic Technology Laboratory, Beijing University of Technology, Beijing 100022, China
  • [ 5 ] [Sun, Hao]Beijing Optoelectronic Technology Laboratory, Beijing University of Technology, Beijing 100022, China
  • [ 6 ] [Shen, Guangdi]Beijing Optoelectronic Technology Laboratory, Beijing University of Technology, Beijing 100022, China

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Source :

Research and Progress of Solid State Electronics

ISSN: 1000-3819

Year: 2008

Issue: 4

Volume: 28

Page: 537-539

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 5

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