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Abstract：
PCR micro-fluidic biologic chip was fabricated on PMMA substrate by using excimer laser. The impact of excimer laser＇s fluence and the stage velocity on microchannel＇s qualities including depth and roughness was analysed. Smoother microchannel could be etched by using lower laser fluence and stage velocity. The whole sealed PMMA based on PCR micro-fluidic biologic chip was bonded by hotpress method.
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Microfabrication Technology
ISSN： 1003-8213
Year： 2006
Issue： 1
Page： 16-19
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SCOPUS Cited Count：
ESI Highly Cited Papers on the List： 0 Unfold All
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Chinese Cited Count：
30 Days PV： 10
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