Electron　beam　irradiation　induced　phase　transition　processes　were　studied　on　crystalline　approximant　phase　ξ-Al-Ni-Rh　in　Al75Ni15Rh10　alloys.　Approximant　phase　to　amorphous　transition　phase　occurred　under　different　density　of　electron　beam　irradiation.　Phase　transition　and　separation　occurred　in　a　comparatively　lower　density　of　electron　beam　due　to　defects　modulation　and　defects　play　an　important　role　in　this　process.　Higher　density　electron　beam　induces　hollow　holes　with　amorphous　phase　in　the　rim　of　the　hole　in　the　sample　and　face　centered　structure　transition　phase　with　parameter　of　2.2　Å　appears　between　the　amorphous　phase　and　ξ-phase.　The　appearance　of　the　face　centered　structure　indicates　that　it　is　the　most　possible　shortest-range　order　in　amorphous　phase.　©　2020　Institute　of　Physics　Publishing.　All　rights　reserved.