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Author:

Ren, Zhexuan (Ren, Zhexuan.) | An, Xia (An, Xia.) | Wang, Jianing (Wang, Jianing.) | Zhang, Xing (Zhang, Xing.) | Huang, Ru (Huang, Ru.)

Indexed by:

EI Scopus

Abstract:

The impact of y-ray exposure on Hot-Carrier effects of 65nm bulk Si NMOSFETs and the dependence on device geometry is experimentally investigated. Experimental results show that stress-induced degradation on irradiated devices is severer than un-irradiated devices. Besides, the geometry dependence of degradation is illustrated: the narrower the device the larger the stress-induced degradation, which is attributed to the radiation-induced trapped charges in STI. The results indicate that the reliability issue of MOS devices is more challenging in harsh environment due to the synergetic effect of TID and HCI. © 2018 IEEE.

Keyword:

Electric breakdown MOS devices Hot carriers Semiconductor device manufacture Radiation effects MOSFET devices

Author Community:

  • [ 1 ] [Ren, Zhexuan]Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 2 ] [An, Xia]Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 3 ] [Wang, Jianing]Faculty of Information Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 4 ] [Zhang, Xing]Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 5 ] [Huang, Ru]Institute of Microelectronics, Peking University, Beijing; 100871, China

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Year: 2018

Page: 1-3

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count: 5

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 5

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