• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

Huang, Chao (Huang, Chao.) | Chen, Jimin (Chen, Jimin.) (Scholars:陈继民) | Yan, Hengfeng (Yan, Hengfeng.)

Indexed by:

EI Scopus

Abstract:

Optical element of micro grating is usually made using expensive ultraviolet laser or ultrafast laser. In order to reduce the cost a 532nm green laser with long pulse width 1ms was used to etch K9 glass of 5mm thickness directly. This laser is inexpensive and easily maintained comparing with femtosecond laser and excimer laser. It was successfully applied for the fabrication of single trench and two-dimensional periodic micro-structure on K9 glass. We achieved the smooth single trench with the width of 22 pm and depth of 2.2 μm with this laser. The roughness of the trench bottom is below 40nm according to the measurement of 3D profiler. The crisscross 2D periodic micro-structured was etched with the laser fluence 3.5 J/cm2. The depth is about 1.1 μm and the width at the surface of the glass is approximately 15μm. There is no micro crack found on the surface of glass with optical microscope. In addition the diffraction patterns were observed, which proved the optics element works well. Copyright © 2013 MS&T'13®.

Keyword:

Ultrafast lasers Ultraviolet lasers Microstructure Excimer lasers Lasers Glass Fabrication Diffraction gratings

Author Community:

  • [ 1 ] [Huang, Chao]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 2 ] [Chen, Jimin]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 3 ] [Yan, Hengfeng]Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China

Reprint Author's Address:

Email:

Show more details

Related Keywords:

Related Article:

Source :

Year: 2014

Volume: 4

Page: 2450-2457

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

Online/Total:990/10805758
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.