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Author:

Zhu, Kaiyi (Zhu, Kaiyi.) | Chen, Hongfang (Chen, Hongfang.) | Zhang, Shulian (Zhang, Shulian.) | Shi, Zhaoyao (Shi, Zhaoyao.) (Scholars:石照耀) | Wang, Yun (Wang, Yun.) | Tan, Yidong (Tan, Yidong.)

Indexed by:

Scopus SCIE

Abstract:

Since its first application toward displacement measurements in the early-1960s, laser feedback interferometry has become a fast-developing precision measurement modality with many kinds of lasers. By employing the frequency-shifted optical feedback, microchip laser feedback interferometry has been widely researched due to its advantages of high sensitivity, simple structure, and easy alignment. More recently, the laser confocal feedback tomography has been proposed, which combines the high sensitivity of laser frequency-shifted feedback effect and the axial positioning ability of confocal microscopy. In this paper, the principles of a laser frequency-shifted optical feedback interferometer and laser confocal feedback tomography are briefly introduced. Then we describe their applications in various kinds of metrology regarding displacement measurement, vibration measurement, physical quantities measurement, imaging, profilometry, microstructure measurement, and so on. Finally, the existing challenges and promising future directions are discussed.

Keyword:

precision measurement frequency-shifted solid-state laser laser feedback

Author Community:

  • [ 1 ] [Zhu, Kaiyi]Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
  • [ 2 ] [Zhang, Shulian]Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
  • [ 3 ] [Tan, Yidong]Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
  • [ 4 ] [Chen, Hongfang]Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100022, Peoples R China
  • [ 5 ] [Shi, Zhaoyao]Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100022, Peoples R China
  • [ 6 ] [Wang, Yun]Beijing Inst Space Electromech, Beijing 100076, Peoples R China

Reprint Author's Address:

  • [Tan, Yidong]Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China

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Source :

APPLIED SCIENCES-BASEL

ISSN: 2076-3417

Year: 2019

Issue: 1

Volume: 9

2 . 7 0 0

JCR@2022

ESI Discipline: ENGINEERING;

ESI HC Threshold:136

JCR Journal Grade:2

Cited Count:

WoS CC Cited Count: 22

SCOPUS Cited Count: 27

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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