Design of High-precision Dynamic PZT Driving Power Based on PA85A [基于PA85A的高精度动态压电陶瓷驱动电源设计] - Details

Author：

Xu, L. (Xu, L..) | Fan, Q. (Fan, Q..) | Liu, X. (Liu, X..) (Scholars：刘晓) | Zhang, H. (Zhang, H..) | Zhang, Y. (Zhang, Y..) (Scholars：张勇)

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Scopus PKU CSCD

Abstract：

The　piezoelectric　ceramic,as　an　actuator　in　the　atomic　force　microscope　(AFM)　system,can　quickly　trace　the　appearance　of　the　measured　sample.In　order　to　improve　the　positioning　accuracy　and　response　speed　of　PZT　actuators,according　to　the　principle　of　the　voltage-controlled　driving　power,a　high-precision　dynamic　PZT　driving　power　was　designed　based　on　the　high　voltage　operational　amplifier　PA85A.The　factors　that　affect　the　accuracy　and　dynamic　performance　of　system　were　analyzed;　the　method　for　phase　compensation　was　adopted　to　improve　the　stability　of　the　system.The　results　show　that　this　power　has　the　features　of　high-precision,fast　dynamic　response,high　stability,which　can　be　effectively　applied　to　the　AFM　system.　©　2018,　Editorial　Department　of　Journal　of　Piezoelectric　and　Acoustooptic.　All　right　reserved.

Keyword：

Driving power; High voltage operational amplifier; High-precision dynamic; Piezoelectric ceramic; Voltage control

Author Community：

[ 1 ] [Xu, L.]Faculty of Information Technology, Beijing University of Technology, Beijing, 100024, China
[ 2 ] [Xu, L.]Engineering Research Center of Digital Community, Ministry of Education, Beijing, 100024, China
[ 3 ] [Fan, Q.]Faculty of Information Technology, Beijing University of Technology, Beijing, 100024, China
[ 4 ] [Fan, Q.]Engineering Research Center of Digital Community, Ministry of Education, Beijing, 100024, China
[ 5 ] [Liu, X.]Faculty of Information Technology, Beijing University of Technology, Beijing, 100024, China
[ 6 ] [Liu, X.]Engineering Research Center of Digital Community, Ministry of Education, Beijing, 100024, China
[ 7 ] [Zhang, H.]Faculty of Information Technology, Beijing University of Technology, Beijing, 100024, China
[ 8 ] [Zhang, H.]Engineering Research Center of Digital Community, Ministry of Education, Beijing, 100024, China
[ 9 ] [Zhang, Y.]Institute for Microstructure and Properties of Advanced Materials, Beijing University of Technology, Beijing, 100024, China

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Source ：

Piezoelectrics and Acoustooptics

ISSN： 1004-2474

Year： 2018

Issue： 4

Volume： 40

Page： 564-567

Cited Count：

WoS CC Cited Count： 0

SCOPUS Cited Count： 13

ESI Highly Cited Papers on the List： 0 Unfold All

WanFang Cited Count：

Chinese Cited Count：

30 Days PV： 6

Affiliated Colleges：

信息科学技术学院本学院/部未明确归属的数据

材料科学与工程学院本学院/部未明确归属的数据

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