This　paper　describes　a　promising　route　to　introduce　columnar　defects　into　YBCO　films　by　chemical　doping　process.　A　series　of　Y203　and　BaZrO3　doped　YBCO　films　were　fabricated　by　a　TFA-MOD　process.　The　Jc　of　Y203　doped　YBCO　film　was　found　to　be　larger　than　that　of　pure　YBCO　film　at　all　fields　though　no　columnar　defects　were　observed.　On　the　other　hand,　high　density　nanoscale　Zr　enriched　columnar　defects　were　successfully　achieved　in　Zr-doped　YBCO.　The　size　of　these　defects　was　as　small　as　10　nm.　Effects　of　heat　treatment　temperatures　(760°C　∼　820°C),　dwell　times　(0.5　h∼3　h)　and　partial　pressures　of　oxygen　(0∼1%)　on　defects　formation　in　BaZrO3　doped　YBCO　were　investigated.　It　was　found　that　the　formation　of　columnar　defects　depends　on　process　conditions.　Films　with　such　nanoscale　columnar　defects　exhibited　a　significant　enhancement　of　Jc　at　all　fields.　Maximum　pinning　force　density　exceeding　8　GN　m-3　was　obtained　in　5%　BZO-doped　YBCO　films.　©　2009　IEEE.