In　order　to　improve　the　transmittance　and　self-cleaning　properties　of　solar　cell　cover　glass.　The　borosilicate　glass　was　etched　by　electron　cyclotron　resonance　(ECR)　plasma　etching　with　metal　nanoparticles　mask.　The　glass　surface　after　etching　was　observed　by　scanning　electron　microscopy　(SEM).　The　change　of　the　transmittance　of　the　glass　after　etching　was　measured　by　the　UV-VIS　spectrophotometer.　The　wetting　property　of　the　bare　and　etching　glass　was　determined　by　the　contact　angle　instrument.　The　results　show　the　mountainous　structure　was　formed　on　glass　substrate　after　ECR　plasma　etching,　and　its　average　size　ranges　from　80　nm　to　140　nm.　The　visible　light　transmittance　of　the　glass　is　effectively　improved.　It　increases　from　91%　to　94.4%　with　the　bias　etching.　Moreover,　It　enhancs　the　hydrophilicity　on　the　surface　of　the　glass.　The　lower　contact　angle　(θc)　of　7.4°　is　obtained　compared　to　the　bare　glass　substrate　(θc~47.2°).　The　self-cleaning　properties　are　improved.　©　2015,　Beijing　University　of　Technology.　All　right　reserved.