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Abstract:
The design, sensitive mechanism and numerical simulation of an fluidic gyroscope based on MEMS with an open airflow channel are reported. The 3D transient numerical analysis based on the fluid-structure interaction was used to calculate the movement of airflow in the sensitive element. Calculations and results indicated that: ①With the drive of piezoelectric pump, the airflow flows into the open airflow channel through two inlets and then gather together. Then, the airflow flows through the nozzle and forms the sensitive jet flow in the fluidic sensing cavity, thus there is a directional flow between inlets and outlet. ②Sensitive jet flow deflects because of the Coriolis Force and exchanges heat with the hotwires which forms the Wheatstone bridge. Therefore, Wheatstone bridge outputs an unbalanced voltage proportional to the applied angular velocity. ③The sensitivity of mentioned gyroscope is SFZ=2.0 μV/°/s, and simultaneously, the nonlinearity is better than 0.5%. © 2017, The Editorial Office of Chinese Journal of Sensors and Actuators. All right reserved.
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Chinese Journal of Sensors and Actuators
ISSN: 1004-1699
Year: 2017
Issue: 10
Volume: 30
Page: 1483-1487
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 5
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