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Author:

Liang, Feng (Liang, Feng.) | Liang, Dong-Dong (Liang, Dong-Dong.) | Qian, Ying-Jing (Qian, Ying-Jing.) (Scholars:钱霙婧)

Indexed by:

EI Scopus SCIE

Abstract:

Micro-electro-mechanical system (MEMS) gyroscope is an important sort of inertial sensor for measuring the angular velocity of spinning structures, which has been extensively applied in various engineering areas used for guidance, location and motion control. In this paper, an improved design of MEMS vibratory ring gyroscope is proposed, in which a thin layer of piezoelectric film (PZF) is introduced encircling the circumferential surface of the ring, aiming to modify the rigidity of the gyroscope. The ring and the PZF are both driven by direct in conjunction with alternating voltages. The coupled differential equations governing the drive and sense motions are established via the Lagrangian equations. The forced responses to the periodic electrostatic action are obtained and the effects of the drive bias voltage, piezoelectric voltage and spinning speed are discussed. Numerical example demonstrates that the employment of PZF can greatly enhance the gyroscope sensitivity. Parametric vibration of the gyroscope due to periodically varying rigidity induced by the periodic piezoelectric voltage is also investigated. The stability regions of the system are acquired by using the multiple scales method, and the effect of the piezoelectric voltage is analyzed. The results show that the attached PZF can also enhance the gyroscope sensitivity by the generated parametric resonance.

Keyword:

Piezoelectric film MEMS ring gyroscope Parametric vibration Forced vibration Sensitivity

Author Community:

  • [ 1 ] [Liang, Feng]Yangzhou Univ, Coll Mech Engn, Yangzhou 225127, Peoples R China
  • [ 2 ] [Liang, Dong-Dong]Beijing Univ Technol, Coll Mech Engn & Appl Elect, Beijing Key Lab Nonlinear Vibrat & Strength Mech, Beijing 100124, Peoples R China
  • [ 3 ] [Qian, Ying-Jing]Beijing Univ Technol, Coll Mech Engn & Appl Elect, Beijing Key Lab Nonlinear Vibrat & Strength Mech, Beijing 100124, Peoples R China

Reprint Author's Address:

  • 钱霙婧

    [Liang, Feng]Yangzhou Univ, Coll Mech Engn, Yangzhou 225127, Peoples R China;;[Qian, Ying-Jing]Beijing Univ Technol, Coll Mech Engn & Appl Elect, Beijing Key Lab Nonlinear Vibrat & Strength Mech, Beijing 100124, Peoples R China

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Source :

INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES

ISSN: 0020-7403

Year: 2020

Volume: 187

7 . 3 0 0

JCR@2022

ESI Discipline: ENGINEERING;

ESI HC Threshold:115

Cited Count:

WoS CC Cited Count: 28

SCOPUS Cited Count: 26

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 9

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