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Abstract:
Phase change memory (PCM) cells based on Ge2Sb2Te5 were synthesized and investigated. Current-voltage measurements demonstrated different final resistances. Transmission electron microscopy (TEM), high resolution electron microscopy (HREM) and the energy dispersive X-ray spectroscopy (EDS) analyses were used to characterize the microstructures of the PCM cells. The architectures, structures and defects in the cells including the deposited elemental distributions and the interfacial structures between electrodes and barrier layers were studied in detail.
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SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES
ISSN: 1006-9321
Year: 2009
Issue: 9
Volume: 52
Page: 2724-2726
JCR Journal Grade:3
CAS Journal Grade:1
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 8