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Author:

Wang Ke (Wang Ke.) | Han XiaoDong (Han XiaoDong.) (Scholars:韩晓东) | Zhang Ze (Zhang Ze.) | Wu LiangCai (Wu LiangCai.) | Liu Bo (Liu Bo.) (Scholars:刘博) | Song ZhiTang (Song ZhiTang.) | Feng SongLin (Feng SongLin.)

Indexed by:

EI Scopus SCIE

Abstract:

Phase change memory (PCM) cells based on Ge2Sb2Te5 were synthesized and investigated. Current-voltage measurements demonstrated different final resistances. Transmission electron microscopy (TEM), high resolution electron microscopy (HREM) and the energy dispersive X-ray spectroscopy (EDS) analyses were used to characterize the microstructures of the PCM cells. The architectures, structures and defects in the cells including the deposited elemental distributions and the interfacial structures between electrodes and barrier layers were studied in detail.

Keyword:

microstructure multilayer structure electron microscopy

Author Community:

  • [ 1 ] [Wang Ke]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 2 ] [Han XiaoDong]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 3 ] [Zhang Ze]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China
  • [ 4 ] [Wu LiangCai]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Lab Nanotechnol, Shanghai 200050, Peoples R China
  • [ 5 ] [Liu Bo]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Lab Nanotechnol, Shanghai 200050, Peoples R China
  • [ 6 ] [Song ZhiTang]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Lab Nanotechnol, Shanghai 200050, Peoples R China
  • [ 7 ] [Feng SongLin]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Lab Nanotechnol, Shanghai 200050, Peoples R China

Reprint Author's Address:

  • 韩晓东

    [Han XiaoDong]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China

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Source :

SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES

ISSN: 1006-9321

Year: 2009

Issue: 9

Volume: 52

Page: 2724-2726

JCR Journal Grade:3

CAS Journal Grade:1

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 8

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