Lotus-leaf-like　amorphous　carbon　(a-C)　films　were　fabricated　on　glass　and　Si　substrates　by　a　magnetron　sputtering　system　and　fluorinated　in　carbon　tetrafluoride　plasma.　The　fluorinated　films　(a-C:F)　had　a　maximum　contact　angle　(CA)　of　about　162　degrees,　which　is　much　larger　than　that　of　the　nonfluorinated　films　(105　degrees).　Furthermore,　the　geometric　microstructure　and　chemical　composition　of　the　a-C:F　films　were　investigated　by　scanning　electron　microscopy　and　Fourier　transform　infrared　spectrometry,　respectively.　The　characterization　results　indicated　that　the　CA　on　the　surfaces　of　the　a-C:F　films　can　be　improved　remarkably　by　the　plasma-fluorinated　process.　Such　a-C:F　films　that　combine　superhydrophobicity　with　other　properties　may　have　many　potential　applications.