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Abstract:
A scanning electron microscope (SEM), in an oxygen environment, was set-up to study the charging phenomena and charge compensation of oxides. Under an O-2 pressure between 2.9 x 10(-3) and 2 x 10(-2) Pa, the charging of an amorphous SiO2 with Cu stripes and a polycrystalline Al2O3 were reduced. The charging effect and charge compensation of oxides may be due to the formation of surface anion vacancies under primary electron bombardment and the replenishment of oxygen ions under an oxygen atmosphere. The Auger electron spectroscopy (AES) of Al2O3 proved that the charging effect of the Al2O3 was completely compensated in the environment of O-2 at pressures down to 5 x 10(-6) Pa.
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INSTRUMENTATION SCIENCE & TECHNOLOGY
ISSN: 1073-9149
Year: 2004
Issue: 1
Volume: 32
Page: 61-68
1 . 6 0 0
JCR@2022
ESI Discipline: ENGINEERING;
JCR Journal Grade:3
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count: 1
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 1
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