• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

Zhang, Zhuo (Zhang, Zhuo.) | Zhang, Weize (Zhang, Weize.) | Wu, Qiyang (Wu, Qiyang.) | Yu, Yueqing (Yu, Yueqing.) (Scholars:余跃庆) | Liu, Xinyu (Liu, Xinyu.) | Zhang, Xuping (Zhang, Xuping.)

Indexed by:

CPCI-S EI Scopus

Abstract:

This paper presents a comprehensive analytical model for a Z-shaped electrothermal microactuator operating in air condition. The model provides the estimate of the tip displacement of the microactuator directly based on a voltage difference applied on the both anchors of the actuator. In an attempt to improve the accuracy of modeling, the impact of the shuttle and multiple pairs of beams are included in the model. The numerical simulations with a Finite Element (FE) model are conducted using the commercialized FE software ANSYS to verify the analytical model. The experimental testing is performed as well to validate the analytical model. The analytical results based on the proposed model agree well with both the FE modeling and experimental results.

Keyword:

Thermal-mechanical MEMS Analytical model Z-shaped electrothermal microactuator

Author Community:

  • [ 1 ] [Zhang, Zhuo]Beijing Univ Technol, Sch Mech & Elect Engn, Beijing, Peoples R China
  • [ 2 ] [Yu, Yueqing]Beijing Univ Technol, Sch Mech & Elect Engn, Beijing, Peoples R China
  • [ 3 ] [Zhang, Weize]McGill Univ, Dept Mech Engn, Montreal, PQ, Canada
  • [ 4 ] [Wu, Qiyang]McGill Univ, Dept Mech Engn, Montreal, PQ, Canada
  • [ 5 ] [Liu, Xinyu]McGill Univ, Dept Mech Engn, Montreal, PQ, Canada
  • [ 6 ] [Zhang, Xuping]Aarhus Univ, Dept Engn, Aarhus, Denmark
  • [ 7 ] [Zhang, Xuping]Aarhus Univ, Aarhus Sch Engn, Aarhus, Denmark

Reprint Author's Address:

  • [Zhang, Xuping]Aarhus Univ, Dept Engn, Aarhus, Denmark

Show more details

Related Keywords:

Related Article:

Source :

RECENT ADVANCES IN MECHANISM DESIGN FOR ROBOTICS

ISSN: 2211-0984

Year: 2015

Volume: 33

Page: 177-187

Language: English

Cited Count:

WoS CC Cited Count: 12

SCOPUS Cited Count: 15

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 6

Online/Total:670/10626583
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.