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Author:

Teo, K. B. K. (Teo, K. B. K..) | You, B. (You, B..) | Rupesinghe, N. L. (Rupesinghe, N. L..) | Newham, A. (Newham, A..) | Greenwood, P. (Greenwood, P..) | Buttress, S. (Buttress, S..) | Cole, M. T. (Cole, M. T..) | Tao, L. (Tao, L..) | Lee, J. (Lee, J..) | Akinwande, D. (Akinwande, D..) | Celebi, K. (Celebi, K..) | Park, H. G. (Park, H. G..) | Sun, J. (Sun, J..)

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CPCI-S

Abstract:

Growth and characterization of graphene grown using copper foils as well as copper films on silicon dioxide on silicon substrates were performed. Kinetics of growth and effective activation energy for the graphene synthesis will be discussed for the surface catalytic synthesis of graphene. Conditions for large-scale synthesis of monolayer graphene will be addressed in this talk. Wafer-scale graphene transfer and electrical results will be presented. Based on our preliminary results from capped 100mm wafer scale graphene transistors, we expect a mobility of 4-6 k cm(2)/Vs with symmetry hole/electron transport. Key considerations and challenges for scaling are discussed and results for graphene growth on the 300mm wafer scale will be discussed.

Keyword:

Author Community:

  • [ 1 ] [Teo, K. B. K.]Aixtron Ltd, Nanoinstruments Swavesey, Cambridge CB24 4FQ, England
  • [ 2 ] [You, B.]Aixtron Ltd, Nanoinstruments Swavesey, Cambridge CB24 4FQ, England
  • [ 3 ] [Rupesinghe, N. L.]Aixtron Ltd, Nanoinstruments Swavesey, Cambridge CB24 4FQ, England
  • [ 4 ] [Newham, A.]Aixtron Ltd, Nanoinstruments Swavesey, Cambridge CB24 4FQ, England
  • [ 5 ] [Greenwood, P.]Aixtron Ltd, Nanoinstruments Swavesey, Cambridge CB24 4FQ, England
  • [ 6 ] [Buttress, S.]Aixtron Ltd, Nanoinstruments Swavesey, Cambridge CB24 4FQ, England
  • [ 7 ] [Cole, M. T.]Aixtron Ltd, Nanoinstruments Swavesey, Cambridge CB24 4FQ, England
  • [ 8 ] [Tao, L.]Univ Texas Austin, Dept Elect & Comp Engn, Austin, TX 78712 USA
  • [ 9 ] [Lee, J.]Univ Texas Austin, Dept Elect & Comp Engn, Austin, TX 78712 USA
  • [ 10 ] [Akinwande, D.]Univ Texas Austin, Dept Elect & Comp Engn, Austin, TX 78712 USA
  • [ 11 ] [Celebi, K.]ETH, Dept Mech & Proc Engn, CH-8092 Zurich, Switzerland
  • [ 12 ] [Park, H. G.]ETH, Dept Mech & Proc Engn, CH-8092 Zurich, Switzerland
  • [ 13 ] [Sun, J.]Beijing Univ Technol, Optoelect Lab, Beijing 100124, Peoples R China
  • [ 14 ] [Sun, J.]Chalmers, MC2, S-41296 Gothenburg, Sweden

Reprint Author's Address:

  • [Teo, K. B. K.]Aixtron Ltd, Nanoinstruments Swavesey, Cambridge CB24 4FQ, England

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Source :

2013 13TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)

Year: 2013

Page: 1200-1203

Language: English

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 3

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