Indexed by:
Abstract:
Planar polishing is an important manufacturing process for high-precision planar components. In this study, a real-time dresser and a planar polishing process based on real-time dressing for large-aperture optical plane components were developed. Efficient dressing of a polishing pad surface can be achieved with the real-time dresser. Compared with the conventional method, real-time correction for the surface shape of the polishing pad was realized via the temperature parameter t in the real-time dresser, and this parameter can be optimized through optimization experiments. Finally, a series of experiments was carried out to verify the effectiveness of the real-time dresser on surface dressing. Through the real-time dressing of the polishing pad surface, the flatness peak-valley deviation and the root-mean-square deviation of the flat optical element surface (430 x 430 mm) can reach 3 lambda and 0.9 lambda, which is improved by 25% and 33%, respectively. (C) 2022 Optica Publishing Group
Keyword:
Reprint Author's Address:
Email:
Source :
APPLIED OPTICS
ISSN: 1559-128X
Year: 2022
Issue: 12
Volume: 61
Page: 3319-3327
1 . 9
JCR@2022
1 . 9 0 0
JCR@2022
ESI Discipline: PHYSICS;
ESI HC Threshold:41
JCR Journal Grade:3
CAS Journal Grade:4
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count: 1
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 14
Affiliated Colleges: