In　this　investigation,　it　is　found　that　the　generated　elastic　stress　during　the　unconstraint　vibration　treatment　process　can　act　as　the　dislocation　driving　stress　on　the　dislocation　in　the　micro-scale.　When　the　sum　of　the　dislocation　driving　stress,　the　image　stress　and　the　back　stress　exceeds　the　motion　resistance　of　the　dislocations　in　a　pile-up,　the　dislocations　begin　to　reverse　back,　and　the　pile-up　disappear.　Based　on　this　principle,　a　fatigue　damage-healing　model　under　unconstraint　vibration　condition　was　proposed.　The　verified　results　showed　that　the　damaged　copper　film　can　be　effectively　healed　by　the　unconstraint　vibration　guided　by　the　model　calculation.