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Author:

Li, Yuan (Li, Yuan.) | Ma, He (Ma, He.) (Scholars:马赫) | Tang, Fawei (Tang, Fawei.) | Li, Chenyu (Li, Chenyu.) | Wang, Bolun (Wang, Bolun.) | Song, Xiaoyan (Song, Xiaoyan.) | Liu, Kai (Liu, Kai.) | Zhang, Xinping (Zhang, Xinping.)

Indexed by:

EI Scopus SCIE

Abstract:

Microactuators that convert external stimuli such as heat, light, current, and magnetic field into mechanical motion are essential components in microelectro-mechanical systems. To date, microactuators have been fabricated mainly using conventional microfabrication technologies and inorganic thin films, but although such technologies facilitate the mass production of microdevices, they are expensive and lack flexibility when either preparing only a few devices or facing special needs. Laser-direct-writing is an effective complement to microfabrication, but is seldom used in the construction of inorganic microactuators. In this work, a laser-direct-writing technique on the freestanding vanadium dioxide (VO2) film for fabricating microactuators with arbitrary shapes is developed. The precision of the laser direct writing attained 2 mu m under ultralow pulse energy of 52 pJ. The pulse energy is two orders of magnitude lower than that needed for patterning VO2 film and other semiconductor materials on substrates. The overall performance of the resulting VO2 microactuators is comparable with that of those fabricated by conventional microfabrication technologies, but the fabricating efficiency and flexibility are increased. Such a fabrication strategy can also be used to fabricate other smart microdevices, such as strain sensors and photodetectors.

Keyword:

laser direct writing microactuator phase transition vanadium dioxide

Author Community:

  • [ 1 ] [Li, Yuan]Beijing Univ Technol, Fac Sci, Inst Informat Photon Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Ma, He]Beijing Univ Technol, Fac Sci, Inst Informat Photon Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Zhang, Xinping]Beijing Univ Technol, Fac Sci, Inst Informat Photon Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Tang, Fawei]Beijing Univ Technol, Educ Minist China, Key Lab Adv Funct Mat, Coll Mat Sci & Engn, Beijing 100124, Peoples R China
  • [ 5 ] [Song, Xiaoyan]Beijing Univ Technol, Educ Minist China, Key Lab Adv Funct Mat, Coll Mat Sci & Engn, Beijing 100124, Peoples R China
  • [ 6 ] [Li, Chenyu]Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
  • [ 7 ] [Wang, Bolun]Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
  • [ 8 ] [Liu, Kai]Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China

Reprint Author's Address:

  • [Ma, He]Beijing Univ Technol, Fac Sci, Inst Informat Photon Technol, Beijing 100124, Peoples R China;;[Zhang, Xinping]Beijing Univ Technol, Fac Sci, Inst Informat Photon Technol, Beijing 100124, Peoples R China;;[Liu, Kai]Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China;;

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Source :

ADVANCED MATERIALS TECHNOLOGIES

ISSN: 2365-709X

Year: 2022

Issue: 1

Volume: 8

6 . 8

JCR@2022

6 . 8 0 0

JCR@2022

JCR Journal Grade:1

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count: 6

SCOPUS Cited Count: 7

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 5

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