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Author:

Wang, Lihao (Wang, Lihao.) | Jia, Yunpeng (Jia, Yunpeng.) | Zhou, Xintian (Zhou, Xintian.) | Zhao, Yuanfu (Zhao, Yuanfu.) | Wang, Liang (Wang, Liang.) | Li, Tongde (Li, Tongde.) | Hu, Dongqing (Hu, Dongqing.) | Wu, Yu (Wu, Yu.) | Deng, Zhonghan (Deng, Zhonghan.)

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EI Scopus SCIE

Abstract:

This article presents the experimental results of the heavy-ion-induced gate oxide damage and single-event burnout (SEB) in 1200 V SiC double-trench MOSFETs. The short-circuit between any two terminals of devices under test (DUTs) was observed during the exposure with a drain bias of only 100 V and post-irradiation measurements. In addition, the experimental results also showed that the SEB threshold of DUTs does not exceed 500 V, which was lower than 42 % of the rated breakdown voltage. TCAD simulations revealed that the electric field concentrated at the corner and sidewall of gate oxide, resulting in the latent oxide damage, which should be responsible for the leakage current degradation at low drain bias. It was also verified that the SEB failure was due to the thermal destruction caused by the high temperature near the n− drift/n+ substrate junction, which was further determined by the SEM image of the die surface. The findings in this article could provide indications for future use of such state-of-the-art SiC double-trench MOSFETs in space. © 2022 Elsevier Ltd

Keyword:

Silicon Gates (transistor) Heavy ions MOSFET devices Radiation hardening Leakage currents Drain current Silicon carbide Ion bombardment Electric fields

Author Community:

  • [ 1 ] [Wang, Lihao]Faculty of Information Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 2 ] [Jia, Yunpeng]Faculty of Information Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 3 ] [Zhou, Xintian]Faculty of Information Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 4 ] [Zhao, Yuanfu]Faculty of Information Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 5 ] [Zhao, Yuanfu]Beijing Microelectronics Technology Institute, Beijing; 100076, China
  • [ 6 ] [Wang, Liang]Beijing Microelectronics Technology Institute, Beijing; 100076, China
  • [ 7 ] [Li, Tongde]Beijing Microelectronics Technology Institute, Beijing; 100076, China
  • [ 8 ] [Hu, Dongqing]Faculty of Information Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 9 ] [Wu, Yu]Faculty of Information Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 10 ] [Deng, Zhonghan]Faculty of Information Technology, Beijing University of Technology, Beijing; 100124, China

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Source :

Microelectronics Reliability

ISSN: 0026-2714

Year: 2022

Volume: 137

1 . 6

JCR@2022

1 . 6 0 0

JCR@2022

ESI Discipline: ENGINEERING;

ESI HC Threshold:49

JCR Journal Grade:4

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 8

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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