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Author:

Xu, Ke (Xu, Ke.) | An, Qiang (An, Qiang.) | Li, Peng (Li, Peng.)

Indexed by:

EI Scopus SCIE

Abstract:

The atomic force microscope (AFM) is widely used in many fields such as biology, materials, and physics due to its advantages of simple sample preparation, high-resolution topography measurement and wide range of applications. However, the low scanning speed of traditional AFM limits its dynamics process monitoring and other further application. Therefore, the improvement of AFM scanning speed has become more and more important. In this review, the working principle of AFM is first proposed. Then, we introduce the improvements of cantilever, drive mechanism, and control method of the high-speed atomic force microscope (HS-AFM). Finally, we provide the next developments of HS-AFM.

Keyword:

AFM topography cantilever feedback control algorithm scanner High-speed AFM

Author Community:

  • [ 1 ] [Xu, Ke]Shenyang Jianzhu Univ, Sch Informat & Control Engn, Shenyang, Peoples R China
  • [ 2 ] [An, Qiang]Shenyang Jianzhu Univ, Sch Informat & Control Engn, Shenyang, Peoples R China
  • [ 3 ] [Li, Peng]Beijing Univ Technol, Fac Mat & Mfg, Beijing 100124, Peoples R China

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Source :

CURRENT NANOSCIENCE

ISSN: 1573-4137

Year: 2022

Issue: 5

Volume: 18

Page: 545-553

1 . 5

JCR@2022

1 . 5 0 0

JCR@2022

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:66

JCR Journal Grade:4

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count: 2

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 7

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