We　developed　a　multi-probe　atomic　force　microscope　(MP-AFM)　system　with　up　to　four　probes　and　realized　various　functions　such　as　topography　mapping,　probing　electrical　property,　and　local　temperature　measurement.　Each　probe　mounted　on　the　corresponding　probe　scanner　was　controlled　independently,　and　the　system　employed　the　optical　beam　deflection　method　to　measure　the　deflection　of　each　cantilever.　A　high-performance　MP-AFM　system　with　a　compact　optical　design　and　rigid　actuators　was　finally　established.　We　demonstrated　AFM　high-resolution　imaging　in　air　and　performed　four-probe　imaging　in　parallel　and　multi-functional　characterization　with　the　MP-AFM　system.