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Author:

Chen, Z. (Chen, Z..) | Zhao, J. (Zhao, J..) | Zhang, J. (Zhang, J..) | Zhang, L. (Zhang, L..) | Yu, D. (Yu, D..)

Indexed by:

Scopus

Abstract:

This paper reports the wafer level surface acoustic wave (SAW) filter package design, fabrication technology, and reliability aspects. The key process including cavity wall (CV) dam fabricating, non-photosensitive dry film lamination, redistribution layer (RDL), and ball-grid array formation are developed. Additionally, a computer research using the finite element model (FEM) has been done to examine the evolution of wafer warpage. The results match the experiment well. After the fabrication process optimization, the reliability of the packages is characterized by pre-conditional level 3 (Pre Con-L3) and unbiased-highly accelerated stress (uHAST), and the results show a good package level reliability. This work offers insight work for the SAW filter package design.  © 2022 IEEE.

Keyword:

Wafer level package SAW filter Finite element model Non-photosensitive dry film capping BGA

Author Community:

  • [ 1 ] [Chen Z.]Xiamen University, School of Electronic Science and Engineering (National Model Microelectronics College), Xiamen, China
  • [ 2 ] [Zhao J.]Beijing University of Technology, Institute of Electronics Packaging Technology and Reliability Faculty of Materials and Manufacturing, Beijing, China
  • [ 3 ] [Zhang J.]Xiamen Sky Semiconductor Technology Co. Ltd., Xiamen, China
  • [ 4 ] [Zhang L.]Xiamen Sky Semiconductor Technology Co. Ltd., Xiamen, China
  • [ 5 ] [Yu D.]Xiamen University, School of Electronic Science and Engineering (National Model Microelectronics College), Xiamen, China

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Year: 2022

Language: English

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ESI Highly Cited Papers on the List: 0 Unfold All

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Chinese Cited Count:

30 Days PV: 2

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