In　this　work,　a　series　of　studies　have　been　carried　out　on　ultra-thin　Ni-5at%W　(Ni5W)　alloy　substrates　used　for　the　coated　conductors.　The　ultra-thin　Ni5W　alloy　substrate　can　be　fabricated　for　the　large　square　REBCO　film　with　a　size　of　over　40　mm　×　40　mm,　which　is　normally　used　in　scenarios　to　support　a　magnetic　field　in　a　specific　area.　To　obtain　a　stronger　recrystallized　cubic　texture,　the　intermediate　annealing　was　added　to　optimize　the　rolling　texture　during　the　rolling　process　of　the　Ni5W　alloy　substrate.　A　typical　copper-type　rolling　texture　was　obtained　in　the　substrate　which　intermediate　annealed　at　96.25%,　and　the　cube　texture　reached　97.6%　after　annealing　recrystallization.　Moreover,　The　deformation　and　recrystallization　of　40　μm　thick　Ni-5at%W　(Ni5W)　alloy　thin　substrates　were　investigated　by　the　quasi-in　situ　method.　The　fabrication　of　ultra-thin　Ni5W　substrates　increases　the　potential　of　miniaturizing　lightweight　coated　conductors,　which　helps　to　further　promote　and　accelerate　the　manufacturing　process　of　the　entire　coated　conductor　strip.　©　2023