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Author:

Almaev, Aleksei (Almaev, Aleksei.) | Yakovlev, Nikita (Yakovlev, Nikita.) | Kopyev, Viktor (Kopyev, Viktor.) | Nikolaev, Vladimir (Nikolaev, Vladimir.) | Butenko, Pavel (Butenko, Pavel.) | Deng, Jinxiang (Deng, Jinxiang.) (Scholars:邓金祥) | Pechnikov, Aleksei (Pechnikov, Aleksei.) | Korusenko, Petr (Korusenko, Petr.) | Koroleva, Aleksandra (Koroleva, Aleksandra.) | Zhizhin, Evgeniy (Zhizhin, Evgeniy.)

Indexed by:

EI Scopus SCIE

Abstract:

The structural and gas-sensitive properties of n-N SnO2/?(e)-Ga2O3:Sn heterostructures were investigated in detail for the first time. The ?(e)-Ga2O3:Sn and SnO2 films were grown by the halide vapor phase epitaxy and the high-frequency magnetron sputtering, respectively. The gas sensor response and speed of operation of the structures under H-2 exposure exceeded the corresponding values of single ?(e)-Ga2O3:Sn and SnO2 films within the temperature range of 25-175 & DEG;C. Meanwhile, the investigated heterostructures demonstrated a low response to CO, NH3, and CH4 gases and a high response to NO2, even at low concentrations of 100 ppm. The current responses of the SnO2/?(e)-Ga2O3:Sn structure to 10(4) ppm of H-2 and 100 ppm of NO2 were 30-47 arb. un. and 3.7 arb. un., correspondingly, at a temperature of 125 & DEG;C. The increase in the sensitivity of heterostructures at low temperatures is explained by a rise of the electron concentration and a change of a microrelief of the SnO2 film surface when depositing on ?(e)-Ga2O3:Sn. The SnO2/?(e)-Ga2O3:Sn heterostructures, having high gas sensitivity over a wide operating temperature range, can find application in various fields.

Keyword:

n-N heterostructure SnO2 HVPE gas sensors Sn & kappa;(& epsilon;)-Ga2O3 magnetron sputtering

Author Community:

  • [ 1 ] [Almaev, Aleksei]Natl Res Tomsk State Univ, Res & Dev Ctr Adv Technol Microelect, Tomsk 634050, Russia
  • [ 2 ] [Yakovlev, Nikita]Natl Res Tomsk State Univ, Res & Dev Ctr Adv Technol Microelect, Tomsk 634050, Russia
  • [ 3 ] [Kopyev, Viktor]Natl Res Tomsk State Univ, Res & Dev Ctr Adv Technol Microelect, Tomsk 634050, Russia
  • [ 4 ] [Almaev, Aleksei]Fokon LLC Co, Kaluga 248035, Russia
  • [ 5 ] [Nikolaev, Vladimir]Russian Acad Sci, Ioffe Inst, St Petersburg 194021, Russia
  • [ 6 ] [Butenko, Pavel]Russian Acad Sci, Ioffe Inst, St Petersburg 194021, Russia
  • [ 7 ] [Pechnikov, Aleksei]Russian Acad Sci, Ioffe Inst, St Petersburg 194021, Russia
  • [ 8 ] [Nikolaev, Vladimir]Perfect Crystals LLC Co, St Petersburg 194223, Russia
  • [ 9 ] [Deng, Jinxiang]Beijing Univ Technol, Fac Sci, Dept Condensed Matter Phys, Beijing 100124, Peoples R China
  • [ 10 ] [Korusenko, Petr]St Petersburg State Univ, Dept Solid State Elect, St Petersburg 199034, Russia
  • [ 11 ] [Korusenko, Petr]Omsk State Tech Univ, Dept Phys, Omsk 644050, Russia
  • [ 12 ] [Koroleva, Aleksandra]St Petersburg State Univ, Res Pk, St Petersburg 199034, Russia
  • [ 13 ] [Zhizhin, Evgeniy]St Petersburg State Univ, Res Pk, St Petersburg 199034, Russia

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Source :

CHEMOSENSORS

Year: 2023

Issue: 6

Volume: 11

ESI Discipline: CHEMISTRY;

ESI HC Threshold:20

Cited Count:

WoS CC Cited Count: 9

SCOPUS Cited Count: 10

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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