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Author:

Wang, Xiaohua (Wang, Xiaohua.) | Li, Jingzhen (Li, Jingzhen.) | Yan, Yong (Yan, Yong.) | You, Congya (You, Congya.) | Li, Jingfeng (Li, Jingfeng.) | Wen, Tao (Wen, Tao.) | Liu, Ming (Liu, Ming.) | Yu, Songlin (Yu, Songlin.) | Zhang, Yongzhe (Zhang, Yongzhe.)

Indexed by:

EI Scopus SCIE

Abstract:

We investigate two passivation methods for long-wavelength infrared type-II InAs/GaSb superlattice (T2SL) photodiodes with the P pi BN structure containing an InAs/AlSb hole barrier layer. In order to eliminate the surface defects of T2SL better to further reduce the surface dark current, anodic vulcanization and SiO2 composite passivation method is adopted to optimize the original SiO2 passivation method. At 77 K, the I-V curve of the devices under the two passivation methods are obtained. Compared with passivation-only SiO2, the dark current density of the anode sulfide and SiO2 composite passivation detector is reduced by one order of magnitude, and the surface resistivity is effectively improved by an order of magnitude. Additionally, the composite passivation method not only improves the uniformity of the device, but also prevents the peeling of the S layer to improve the quality of passivation. This work offers a stable and high-quality passivation method, and it could be popularized passivation in the field of optics, electronics, optoelectronics, and switching devices.

Keyword:

Photodiodes Passivation Long-wavelength GaSb InAs

Author Community:

  • [ 1 ] [Wang, Xiaohua]Beijing Univ Technol, Coll Mat Sci & Engn, Key Lab Adv Funct Mat, Minist Educ, Beijing 100124, Peoples R China
  • [ 2 ] [Li, Jingzhen]Beijing Univ Technol, Coll Mat Sci & Engn, Key Lab Adv Funct Mat, Minist Educ, Beijing 100124, Peoples R China
  • [ 3 ] [Yan, Yong]Beijing Univ Technol, Coll Mat Sci & Engn, Key Lab Adv Funct Mat, Minist Educ, Beijing 100124, Peoples R China
  • [ 4 ] [Zhang, Yongzhe]Beijing Univ Technol, Coll Mat Sci & Engn, Key Lab Adv Funct Mat, Minist Educ, Beijing 100124, Peoples R China
  • [ 5 ] [Li, Jingzhen]Beijing Univ Technol, Fac Informat Technol, Key Lab Optoelect Technol, Educ Minist China, Beijing 100124, Peoples R China
  • [ 6 ] [Zhang, Yongzhe]Beijing Univ Technol, Fac Informat Technol, Key Lab Optoelect Technol, Educ Minist China, Beijing 100124, Peoples R China
  • [ 7 ] [You, Congya]North China Res Inst Electroopt, Beijing 100015, Peoples R China
  • [ 8 ] [Li, Jingfeng]North China Res Inst Electroopt, Beijing 100015, Peoples R China
  • [ 9 ] [Wen, Tao]North China Res Inst Electroopt, Beijing 100015, Peoples R China
  • [ 10 ] [Liu, Ming]North China Res Inst Electroopt, Beijing 100015, Peoples R China
  • [ 11 ] [Yu, Songlin]North China Res Inst Electroopt, Beijing 100015, Peoples R China

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Source :

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

ISSN: 1369-8001

Year: 2023

Volume: 164

4 . 1 0 0

JCR@2022

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:26

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

Affiliated Colleges:

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