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Author:

Duan, Jiahui (Duan, Jiahui.) | Xiang, Jinjuan (Xiang, Jinjuan.) | Zhou, Lixing (Zhou, Lixing.) | Wang, Xiaolei (Wang, Xiaolei.) (Scholars:王晓蕾) | Ma, Xueli (Ma, Xueli.) | Wang, Wenwu (Wang, Wenwu.)

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EI Scopus SCIE

Abstract:

We theoretically calculate the electron mobility in silicon nanowire metal-oxide-semiconductor field-effect transistor. The calculation of electron mobility is based on the Kubo-Greenwood formulation and the self-consistent solutions of Schrodinger and Poisson equations. Phonon scattering (PHS), Coulomb scattering, and surface roughness scattering (SRS) mechanisms are considered in this study. The nonlinear SRS model is employed because it can reproduce the experimental mobility with realistic surface roughness parameters. The simulation demonstrates that PHS and SRS are both vital scattering mechanisms. The rate of SRS significantly increases with decreasing device size, and SRS is the dominant scattering mechanism in ultra-narrow silicon nanowires.

Keyword:

Author Community:

  • [ 1 ] [Duan, Jiahui]Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China
  • [ 2 ] [Xiang, Jinjuan]Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China
  • [ 3 ] [Wang, Xiaolei]Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China
  • [ 4 ] [Ma, Xueli]Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China
  • [ 5 ] [Wang, Wenwu]Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China
  • [ 6 ] [Duan, Jiahui]Univ Chinese Acad Sci, Beijing 100049, Peoples R China
  • [ 7 ] [Wang, Xiaolei]Univ Chinese Acad Sci, Beijing 100049, Peoples R China
  • [ 8 ] [Wang, Wenwu]Univ Chinese Acad Sci, Beijing 100049, Peoples R China
  • [ 9 ] [Zhou, Lixing]Beijing Univ Technol, Beijing 100124, Peoples R China

Reprint Author's Address:

  • 王晓蕾

    [Xiang, Jinjuan]Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China;;[Wang, Xiaolei]Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China;;[Ma, Xueli]Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China;;[Wang, Xiaolei]Univ Chinese Acad Sci, Beijing 100049, Peoples R China

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Source :

JAPANESE JOURNAL OF APPLIED PHYSICS

ISSN: 0021-4922

Year: 2020

Issue: 3

Volume: 59

1 . 5 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:100

Cited Count:

WoS CC Cited Count: 5

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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