Fiber　Bragg　Gratings　(FBG)　have　great　significance　in　the　development　of　high-power　fiber　laser　systems.　Fabrication　sources,　fibers,　and　fabrication　technology　would　affect　the　performance　of　FBGs　directly.　In　this　research,　a　scanning　exposure　method　for　fabricating　FBGs　in　different　types　of　photosensitive　fibers　with　a　213nm　solid-state　laser　source　was　proposed.　The　Q-switched　Nd:　YVO4　laser　fifth　harmonic　source　was　compared　with　the　traditional　excimer　lasers　and　the　impacts　of　lengths,　center　wavelengths,　titled　angles,　and　apodization　on　the　reflection　and　transmission　spectra　of　FBGs　were　discussed.　The　scanning　fabrication　system,　which　can　realize　the　tilting　of　phase　mask　and　the　adjustment　and　monitoring　of　tension,　was　built　according　to　the　characteristics　that　the　output　spot　diameter　of　the　fabrication　source　was　sub-millimeter.　While　the　high　quality　of　fabrication　was　guaranteed,　FBGs　with　lengths　of　3mm~20mm,　center　wavelengths　shift　of　0nm~4.2nm,　and　tilted　angles　of　0~210　were　obtained,　and　all　the　parameters　were　simultaneously　adjusted　and　controlled,　the　deepest　transmission　loss　of　about　-70dB.　FBGs　fabricated　were　of　good　stability　and　repeatability,　especially　in　hydrogen　fibers　whose　stability　was　independent　of　high-temperature　annealing　(1500C)　which　was　different　from　the　fabrication　results　of　excimer　laser　sources.　Then　the　unconformity　between　experimental　results　and　theoretical　simulation　was　discussed　and　the　optimization　schemes　were　proposed.　The　experimental　results　and　analysis　provided　a　better　experimental　scheme　for　UV　laser　fabricating　FBGs　and　the　experimental　basis　for　further　optimizing　the　fabrication　technology　and　further　analyzing　the　microscopic　mechanism　of　optical　fiber　photosensitivity.　©　2021　SPIE.