With　the　development　of　MEMS　(Micro-electro-mechanical　Systems)　techniques,　research　interest　has　deepened　in　micro　piezoelectric　harvesting　device,　which　can　supply　electrical　power　for　wireless　sensors　from　ambient　vibration.　This　paper　proposes　a　nonlinear　analysis　of　a　micro-scale　PEH　(piezoelectric　energy　harvester),　which　is　modeled　by　a　micro-cantilever　plate　with　two　layers　and　a　tip　mass　attached　to　the　free　end.　Considering　size　effect　and　nonlinear　curvature,　based　on　strain　gradient　and　inextensible　plate　theory,　nonlinear　dynamic　equations　of　the　micro　cantilever　piezoelectric　energy　harvester　with　tip　mass　are　established　by　virtue　of　the　Hamilton＇s　principle.　The　maximum　output　voltage　of　piezoelectric　energy　harvester　with　different　tip　mass　is　calculated　respectively　using　MATLAB　software.　Comparative　analysis　confirms　that　an　increase　of　K　(the　mass　ratio　of　the　tip　mass　to　piezoelectric　plate)　reduces　the　natural　frequency　of　energy　harvester　and　significantly　enhances　the　nonlinear　phenomenon.　In　addition,　when　the　mass　ratio　K　exceeds　1,　obvious　superharmonic　resonance　phenomena　generates,　which　considerably　improves　the　output　voltage　of　the　proposed　PEH　in　a　lower　frequency　band.　This　study　proposes　an　approach　to　enhance　the　output　performance　of　micro-cantilever　plate　energy　harvesters　and　broaden　the　bandwidth　of　PEH　to　adapt　low-frequency　ambient　vibration.　©　Published　under　licence　by　IOP　Publishing　Ltd.